Chroma 7214-D is the inspector for Anti-reflection coating process. With 4M mono CCD and Chroma's experience RGB illumination design, we could assure that each defined defectives could be identified through our specified combination.
The 7214-D anti-reflection inspector could be applied in discovering:
- Color difference
- Brownish stains
- Stripe shape watermark
- Belt mark
- Acid mark
- Stacking cells
With our flexible and hierarchy software design, customer could set up the criteria to inspect their unique defect that is generated because of different PECVD machines.