Sawmarks happened during the wafering process because of the impurities or vibration of the wires. It happens sometimes in near the edge and sometimes in the center. By following the British standard of EN 50513 2009, Chroma is able to provide the solution that also sense the sawmarks in the center.
- Capable to be integrated to any wafer sorters
- Flexible algorithms editor for mono-crystalline, multi-crystalline and quasi-crystalline wafers, and works for both 5" and 6"
- Multiple interface to communicate with different equipment or manufacturing execution system(MES)
- Follow the British standard of EN 50513 2009 to measure different wafer properties