Automated optical inspection uses machine vision inspection technology to perform high-speed and high-precision optical image verification and replace time-consuming and unstable manual visual inspection. Chroma offers AOI solutions that are equipped with high-resolution optical imaging, multi-functional light sources, and in-house developed white light interferometry. Combining innovative algorithms and AI analysis, the AOI solutions can perform accurate and reliable defect detection, color analysis, and sub-nano 3D profile measurement when integrated into a high-speed automated production line. Chroma's AOI solutions are the best choice to ensure your production quality.

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自動光學檢測系統

製程中晶圓外觀檢查系統 Model7945
  • CE Mark
製程中晶圓外觀檢查系統
Model 7945
  • 雙面檢測(切割後晶圓)
  • 異色缺陷檢測
  • 支援多電腦檢測以縮短處理時間
  • 可共用自動進料機設計
2D/3D晶圓量測系統 Model7980
  • Taiwan Excellence 2026 - 金質獎
2D/3D晶圓量測系統
Model 7980
本系統採用獨特的BLiS量測技術,達到次奈米、非破壞性的表面光學形貌量測,適合半導體製程使用,可支援12吋晶圓的全自動量測。
多功能光學檢測系統 Model7505-01
多功能光學檢測系統
Model 7505-01
  • 提供面板級先進封裝製程量測:TSV/VIA, RDL, Probe Mark, Surface Topography...等
  • 一機具備1D、2D、3D量測能力
  • 使用白光干涉量測技術,可進行3D三維形貌量測,如斷差高度、夾角、面積、體積、粗度、起伏、薄膜厚度及平整度
  • 使用高解析度線型掃瞄相機,可進行高速2D瑕疵量測,可檢出氣泡、刮傷、異物等瑕疵