MEMS/CMOS AOI System

Automated Optical Inspection (AOI) system which combines the inspection devices of machine visual perception, light source system and precision movement control platform has the features of non-contact, fast measurement speed and consistent inspection standard. Based on the technology adopted the AOI solution can be applied to 2D Defect Inspection and 3D Profile Measurement.

Pre/Post Reflow AOILED Die Inspection System3D Optical Profiler