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AOI System

SemiconductorAdvancedPackagingOpticalMetrologySystem
Semiconductor Advanced Packaging Optical Metrology System
Model 7505 Series
The system uses white light interference measurement technique to perform nondestructive and rapid surface profile measurement and analysis, which is suitable for 12" wafer.
3DOpticalProfiler
3D Optical Profiler
Model 7503
  • Use white light interference measurement technique
  • Modulized design
  • Various surface measurement parameters, such as sectional difference, included angle, area, dimension, roughness, waviness, film thickness and flatness
WaferChipInspectionSystem
Wafer Chip Inspection System
Model 7940
  • Simultaneous double side color inspection
  • 6" wafer/8" inspection area
  • Automatic wafer alignment
  • Wafer shape/edge identification
Multi-FunctionalOpticalMeasuringSystem
Multi-Functional Optical Measuring System
Model 7505-05
  • Applies to Mobile phone cosmetic, battery, CG quality testing
  • Integrated with 2D & 3D measurement in one system
  • Tunnel measurement design for High measurement speed
  • Provide immediate histogram to show the quality of each test items immediately
CylindricalBatteryCellAutomatedOpticalInspectionSystem
Cylindrical Battery Cell Automated Optical Inspection System
Model 7505-K006
Applies to various cylindrical battery sizes on the mainstream market.
ThinFilmThicknessAutomatedOpticalMetrologySystem
Thin Film Thickness Automated Optical Metrology System
Model 7505-K007
Applies to Roll to Roll processing and thin film thickness inspection.
Multi-FunctionalOpticalProfilingSystem
Multi-Functional Optical Profiling System
Model 7505-01
  • 1D, 2D and 3D measurement capabilities
  • Equipped with film measurement function (1D) to do non-destructive film thickness measurement when penetrating reflection measurement is in use
  • Perform 2D defect measurement via high resolution line scan camera to check for bubbles, scratches and foreign objects
  • Use white light interferometry to perform 3D Profile measurement
InlineAOIsystem
Inline AOI system
Model 7505-02
  • For ITO (Indium Tin Oxide)Thin-film, RFID and FPC Roll to Roll process online real-time automatic optical inspection 
  • Equipped with high resolution line scan camera, has capabilities of detecting defects, like bubbles, scratches and so on.
  • Use multi-line camera to acquire images in the same time. High testing speed.
  • Equipped with positioning target recognition function and defect map function

Solar Cell AOI System

AutomaticOpticalSolarCell/WaferInspectionSystem
Automatic Optical Solar Cell/Wafer Inspection System
Model 7200 Series
Chroma 7200 series are specially designed for detecting wide variety of defects observed for c-Si cells & wafers for all sizes and crystallizations.
SolarCellQualityClassifier
Solar Cell Quality Classifier
Model 7210
  • Install on the front-end screen printing process or terminal sorting equipment.
  • Solar cell front or back side printing defect all can be detected.
  • It can detected the defects that generated at PERC & Bifacial process.
PrinterAutomaticOpticalInspector
Printer Automatic Optical Inspector
Model 7210-P
  • Solar cell front-side printing defect inspector
  • Detect the defects generated when fabricating PERC and Bifacial solar cells.
  • Install on the rotary table during metallization process.
SolarWaferGeometryandSurfaceInspector
Solar Wafer Geometry and Surface Inspector
Model 7201
  • Solar wafer geometry and surface inspector
  • RGB LED strobe lighting
  • High speed inspection
SolarWaferQualityInspector
Solar Wafer Quality Inspector
Model 7202
  • Solar wafer quality inspector
  • Accurate grain-size calculation
  • Pinhole and chipping inspection
SolarCellFrontsidePrintingandSurfaceDefectInspector(High-Speed)
Solar Cell Frontside Printing and Surface Defect Inspector (High-Speed)
Model 7212-HS
  • Integrated with screen printing line and cell sorting lines from any manufacturers
  • Flexible and intuitive SW user interface
  • Resolution down to 14 μm/pixel
  • Superior stain defects detection
SolarSaferSawmarkInspector
Solar Safer Sawmark Inspector
Model 7231
  • Solar wafer sawmark inspector
  • EN-50513 2009 compliance
  • High reliability
SolarCellBacksidePrintingandSurfaceInspector
Solar Cell Backside Printing and Surface Inspector
Model 7213-AD
  • Solar Cell Backside Printing & Surface Inspector (Diffuser type)
  • V-cut and flake inspection
  • Install on the metallization process and sorting process
Anti-reflectionCoatingInspector
Anti-reflection Coating Inspector
Model 7214-D
  • Anti-reflection Coating Inspector
  • Defects and color variance detection
  • Install right after the PECVD or before the metallization process