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Automated optical inspection uses machine vision inspection technology to perform high-speed and high-precision optical image verification and replace time-consuming and unstable manual visual inspection. Chroma offers AOI solutions that are equipped with high-resolution optical imaging, multi-functional light sources, and in-house developed white light interferometry. Combining innovative algorithms and AI analysis, the AOI solutions can perform accurate and reliable defect detection, color analysis, and sub-nano 3D profile measurement when integrated into a high-speed automated production line. Chroma's AOI solutions are the best choice to ensure your production quality.
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AOI System
In-process Wafer Inspection System
Model 7945
- Double side inspection (post-diced wafer)
- Full color defect detection
- Fast multi-computer image processing
- Shared auto wafer loader
2D/3D Wafer Metrology System
Model 7980
Chroma 7980 2D/3D Wafer Metrology System is powered by patented BLiSTM technology to provide nanoscale nondestructive and rapid surface profile measurement and analysis. The system is suitable for up to 12" wafer with EFEM and SECS/GEM.
Wafer Chip Inspection System
Model 7940
- Simultaneous double side color inspection
- 6" wafer/8" inspection area
- Automatic wafer alignment
- Wafer shape/edge identification
3D Optical Profiler
Model 7503
- Use white light interference measurement technique
- Modulized design
- Various surface measurement parameters, such as sectional difference, included angle, area, dimension, roughness, waviness, film thickness and flatness
Multi-Functional Optical Profiling System
Model 7505-01
- Specially designed for Panel Level Packaging, applications like TSV/VIA, RDL, Probe Mark, Surface Topography...etc
- 1D, 2D and 3D measurement capabilities
- Use white light interferometry to perform 3D Profile measurement, like surface measurement such step height, included angle, area, dimension, thickness, wave, film thickness and smooth level
- Perform 2D defect measurement via high resolution line scan camera to check for bubbles, scratches and foreign objects
Mini LED Backlight Module Automatic Optical Test System
Model 7661-K003
- Integrated 71803-2 2D Color Analyzer executes brightness, color, and defect analysis on Mini LED
- Test items: chromaticity, brightness, luminous intensity, uniformity, voltage, current, and dead lights
- Optional Chroma LED power tester and optical module allow integration into a test system
Solar Cell AOI System
Automatic Optical Solar Cell/Wafer Inspection System
Model 7200 Series
Chroma 7200 series are specially designed for detecting wide variety of defects observed for c-Si cells & wafers for all sizes and crystallizations.
Solar Cell Quality Classifier
Model 7210
- Install on the front-end screen printing process or terminal sorting equipment.
- Solar cell front or back side printing defect all can be detected.
- It can detected the defects that generated at PERC & Bifacial process.
Printer Automatic Optical Inspector
Model 7210-P
- Solar cell front-side printing defect inspector
- Detect the defects generated when fabricating PERC and Bifacial solar cells.
- Install on the rotary table during metallization process.
Solar Wafer Geometry and Surface Inspector
Model 7201
- Solar wafer geometry and surface inspector
- RGB LED strobe lighting
- High speed inspection
Solar Wafer Quality Inspector
Model 7202
- Solar wafer quality inspector
- Accurate grain-size calculation
- Pinhole and chipping inspection
Solar Cell Frontside Printing and Surface Defect Inspector (High-Speed)
Model 7212-HS
- Integrated with screen printing line and cell sorting lines from any manufacturers
- Flexible and intuitive SW user interface
- Resolution down to 14 μm/pixel
- Superior stain defects detection
Solar Safer Sawmark Inspector
Model 7231
- Solar wafer sawmark inspector
- EN-50513 2009 compliance
- High reliability
Solar Cell Backside Printing and Surface Inspector
Model 7213-AD
- Solar Cell Backside Printing & Surface Inspector (Diffuser type)
- V-cut and flake inspection
- Install on the metallization process and sorting process
Anti-reflection Coating Inspector
Model 7214-D
- Anti-reflection Coating Inspector
- Defects and color variance detection
- Install right after the PECVD or before the metallization process
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