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Automated optical inspection uses machine vision inspection technology to perform high-speed and high-precision optical image verification and replace time-consuming and unstable manual visual inspection. Chroma offers AOI solutions that are equipped with high-resolution optical imaging, multi-functional light sources, and in-house developed white light interferometry. Combining innovative algorithms and AI analysis, the AOI solutions can perform accurate and reliable defect detection, color analysis, and sub-nano 3D profile measurement when integrated into a high-speed automated production line. Chroma's AOI solutions are the best choice to ensure your production quality.

AOI System

In-processWaferInspectionSystem Model7945
  • CE Mark
In-process Wafer Inspection System
Model 7945
  • Double side inspection (post-diced wafer)
  • Full color defect detection
  • Fast multi-computer image processing
  • Shared auto wafer loader
2D/3DWaferMetrologySystem Model7980
2D/3D Wafer Metrology System
Model 7980
Chroma 7980 2D/3D Wafer Metrology System is powered by patented BLiSTM technology to provide nanoscale nondestructive and rapid surface profile measurement and analysis. The system is suitable for up to 12" wafer with EFEM and SECS/GEM.
WaferChipInspectionSystem Model7940
Wafer Chip Inspection System
Model 7940
  • Simultaneous double side color inspection
  • 6" wafer/8" inspection area
  • Automatic wafer alignment
  • Wafer shape/edge identification
3DOpticalProfiler Model7503
3D Optical Profiler
Model 7503
  • Use white light interference measurement technique
  • Modulized design
  • Various surface measurement parameters, such as sectional difference, included angle, area, dimension, roughness, waviness, film thickness and flatness
Multi-FunctionalOpticalProfilingSystem Model7505-01
Multi-Functional Optical Profiling System
Model 7505-01
  • Specially designed for Panel Level Packaging, applications like TSV/VIA, RDL, Probe Mark, Surface Topography...etc
  • 1D, 2D and 3D measurement capabilities
  • Use white light interferometry to perform 3D Profile measurement, like surface measurement such step height, included angle, area, dimension, thickness, wave, film thickness and smooth level 
  • Perform 2D defect measurement via high resolution line scan camera to check for bubbles, scratches and foreign objects
MiniLEDBacklightModuleAutomaticOpticalTestSystem Model7661-K003
Mini LED Backlight Module Automatic Optical Test System
Model 7661-K003
  • Integrated 71803-2 2D Color Analyzer executes brightness, color, and defect analysis on Mini LED
  • Test items: chromaticity, brightness, luminous intensity, uniformity, voltage, current, and dead lights
  • Optional Chroma LED power tester and optical module allow integration into a test system